PRV: Piezoelectrically Actuated High-Precision Valve

The PRV is a piezo-actuated fine dosing valve engineered for high-end applications within vacuum technology. It integrates the high-speed response characteristic of piezoelectric actuators with the chemical and mechanical resilience of a sapphire-to-sapphire sealing interface.

• Field of Application: Specifically designed for the high-precision dosing of ultra-low gas volumes in surface physics, mass spectrometry, and semiconductor research.

• Integrated Electronics and System Integration: The valve features highly efficient onboard control circuitry, enabling complete self-powered operation via the 0-10V control signal. This eliminates the necessity for auxiliary power supplies, external high-voltage amplifiers, or dedicated piezo controllers. Furthermore, the BNC interface facilitates seamless "Plug & Play" integration with standard analog outputs of most data acquisition (DAQ) systems.

• Technical Specifications:

  • UHV Standards: Utilizing a DN40CF flange and sapphire sealing surfaces, the valve meets the stringent requirements of Ultra-High Vacuum (UHV) environments.

  • Pressure Rating: Rated for an overpressure of 0.5 bar, ensuring operational safety when interfaced with conventional gas cylinder pressure regulators.

  • Dynamic Range: Exhibits an operational bandwidth spanning six decades of gas flow, offering unprecedented flexibility in experimental process design.

Available worldwide through my distribution partner AMT: https://andreas-mattil.de/