The piezo gas inlet valve enables the highly precise introduction of ultra-low gas flows into UHV or HV
systems (e.g. ion sources, sputter systems, evaporation chambers).
Operation is possible either manually by applying a DC voltage from 0–150 V, or via
automated pressure control.
Connections:
CF40 flange with central M5 thread
3 mm Swagelok
BNC
Available worldwide through my distribution partner AMT: https://andreas-mattil.de/
Duetting Technologies UG (limited liability)
Korbmacherweg 26
48268 Greven
Germany